WebMentioning: 1 - Polysilicon Grating Switches for LiDAR - Cook, Eugene H., J, Spector Steven, G, Moebius Michael, Baruffi, Frederick A., Bancu, Mirela G., Benney ... WebPolysilicon grating switches for LiDAR. EH Cook, SJ Spector, MG Moebius, FA Baruffi, MG Bancu, LD Benney, ... Journal of Microelectromechanical Systems 29 (5), 1008-1013, …
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